To use Shuttle & Find (SW and correlative holders) with an EVO 10 make sure that the stage limits (for x, y and z) are set as follows:

Holder Positions

The holder positions must be oriented like shown in the images

NOTICE

notice

If you set a wrong orientation the stage cannot be moved to all correlative markers because of the stage limits for the EVO 10.

  1. The holder has to be mounted into the EVO in that the way that the correlative markers (1) and (2) have to be near the chamber door whereas marker (3) is located furthest from the chamber door (see Mounting A/B).
  2. If necessary, the SEM image can be rotated according to the LM image using the option Scan Rotate in SmartSEM.

 

Mounting A:

Mounting B: