1. Click on Set to detect the first marker position.
  2. An automatic stage calibration will be performed. After the stage calibration, the system will try to detect the marker position of the small marker automatically.
  3. A message appears which asks if the marker was detected correctly.
  4. Click on Yes to confirm the message.

  5. If the marker was not detected correctly, you have the possibility to set the marker position manually. Therefore simply left-click on the intersection of the L marker in the image and the position will be adapted. Pay attention that you select always the same calibration point on each L-marker.

  6. Click on Next to move to the next step of the wizard.
  7. The stage will automatically move to the next (coarse) marker position. If the stage moves into the wrong direction, you can use the invert X/invert Y buttons to correct the movement direction.
  8. Repeat the previous steps and set marker position 2 and 3 accordingly.
  9. After setting marker position 3 you will find a green check mark icon which shows that the calibration was successful.
  10. Click on Finish to save the calibration and close the wizard.
  1. To check if the calibration was successful acquire an image and open the Tree view in the Center Screen Area. There you should see the correlative calibration data in the list. If the Tree view is not visible, go to Tools > Options > Documents and activate the Enable Tree View checkbox.