If you want to perform layer thickness measurement in ZEN, you need to start the topography measurement wizard.

  1. You are on the Applications tab.
  1. In the Layer Thickness Measurement tool, click on Start.
  2. The wizard starts. In the left tool area you see the step 1/3 Setup, in which you can adjust the acquisition parameters for the topography image. In the center screen area you see the live image from your sample in continuous mode.
  3. In the Acquisition Mode tool adjust the settings for Objective, Frame Size, and Bits per Pixel according to your requirements.

  4. Note that you can not change the parameters Frame size and Bits per Pixel (Bit Depth) while Continuous mode (Live image) is active. To stop it click on the Stop button in the upper left corner.

  5. Focus on the surface. The default pinhole setting is Max. This allows you to easily focus on the surface just like with a widefield microscope. Of course focusing via the eyepieces is also possible.
  6. In the Channels tool, adjust the pinhole to the required diameter. For best performance of the system we recommend to set the pinhole size to 1 Airy Unit (1AU button). Since the depth of field is reduced in confocal images you most probably need to slightly adjust the focus position.
  7. Adjust the intensity of the laser. To do so, focus on the brightest section of the z-stack. Then adjust the laser either via the 405 nm slider or the Master Gain slider. Adjust the intensity so that you do not see any overexposed pixels (shown in red).
  8. In the Z-Stack tool, define the z-stack by adjusting the z-range (upper and lower limit of your z-stack). We recommend to use First/Last mode for that.
  9. Make sure that all layers, you want to measure, are within these limits. In case of a tile scan you can use the navigation arrows in the Tiles tool to jump to the different tiles to check.
  10. Click on Next.
  11. The wizard moves to step 2/3 Sectioning and starts the image acquisition.
  12. After image acquisition and processing you will see the image in the center screen area.
  13. Click on X-Z Layer or Y-Z Layer to create the corresponding cross section you want to analyze in detail.
  14. Click on Next.
  15. The wizard moves to step 3/3 Measurement.
  16. The selected cross section will appear on the right sight of the screen.
  17. Draw in a profile perpendicular to your surface.
  18. The intensity distribution of your profile will appear left to the cross section.
  19. Position the calipers on the maximum intensity of the profile.
  20. A table with the measurement data will appear on top of the profile.

  21. The distance values within this table represent the layer thickness regarding to the light path. They are not corrected by the refractive index of the layer.

  22. Click on Add measurement to table to transfer the data to the result table on the left. Within the table you are able to rename the layers and calculate the true layer thickness by adding the refractive index.
  23. Finally you have three options how to save your results:
    - If you click Save table, the result table is saved on the file system.
    - If you click Save selected profile, the drawn in profile is exported for further investigation in third party software.
    - If you click Save Z-Stack, the raw data of the z-stack is saved on the file system.
  1. You have successfully measured the layer thickness of your sample, saved the results table, the profiles and the raw data of the z-stack.