In this step we will image the ROIs using a high magnification objective and apply a local focus strategy. This will result in very detailed and sharp images of the ROIs which are used for the further processing (e.g. creating Z-Stacks and image correlation with SEM images).

1. You are in step 6/7 ROI Imaging.

1. Under Objective select an objective with a high magnification, e.g. 63x.
2. If you are using fluorescence samples, you can now activate the corresponding fluorescence channel.
3. Under Focus Surface select Local (per Region or Ribbon).
4. Click on Distribute Support Points.
5. According to the step 3 Ribbon Imaging the support points will be distributed automatically. The support points are distributed alternately outside and inside a ROI to guarantee best focusing results.
   
5. Click on Verify Support Points.
6. The software will guide you through the process in the same way you were been guided in step 3 Ribbon Imaging.
7. If you have verified all existing support points, the message All points have been verified will appear.
6. Click on Acquire Images.

1. The ROIs will be imaged now. You can use the next step to check each image of the ROIs and re-acquire (re-shoot) images from ROIs which do not fit your expectations. To proceed with the next step click on Next.