Like the step before this step is exactly the same like for the light microscopy, so please refer to the chapter Calibrating the sample holder for details.

1. The calibration of the sample holder has to be done on both systems the LM and the SEM. Otherwise the relocation of your sample positions or ROIs/POIs stored in the image won`t be successful.
2. Note that for Shuttle & Find the beam shift must be switched off. The beam shift is deactivated in SmartSEM as follows:
3. Call up the shortcut menu Center Point/Feature by right-clicking on the Stage property page.
4. Select Center Point/Feature and select Stage only.