This tool enables you to execute a deconvolution on your SEM data. For a detailed description of the process and algorithm, see Process and Algorithm of SEM Deconvolution.

Parameter

Description

Smoothing

Defines the regularization strength used within the regularized inverse filter with the slider or input field. Small values below 0.1 correspond to no smoothing, large values above 0.5 correspond to high smoothing. Note that values which are too small can amplify the noise in the image.

Detail Enhancement

Defines the width of the PSF in pixels with the slider or input field. A lower Detail Enhancement parameter will enhance details but may introduce noise, while a higher parameter will smooth the image but may reduce sharpness.