SEM/LM system for correlative microscopy
SEM/LM system for correlative microscopy

This module enables you to relocate sample positions in two different microscopes, e.g. a light microscope and a scanning electron microscope (SEM), and the correlation of two images to one merged image. This technique is called correlative microscopy. It is used to combine the two worlds of scanning electron microscopy and light microscopy and brings them together in one image. Note that in the documentation and in the software GUI the abbreviation "S&F" is often used for "Shuttle & Find".

To use the functionality, you need a license for the Connect Toolkit.

The samples can be mounted in specifically designed correlative holder systems (with three correlative calibration markers) from ZEISS. Also user-defined holder systems with three calibration markers can be used. As the shape and size of materials samples vary strongly, a range of flexible correlative holders were designed to fulfill customers' needs.