The EM/EDS analysis of the correlative workflow is based on the same standards like for LM analysis. The definitions for size classification, normalization and cleanliness codes are identical to LM analysis. This includes as well the default measurement parameter.

The guideline for material classification by EM/EDS is described very detailed in the standards for component cleanliness.

For further information on the technical requirements for material characterization with EM/EDS, refer to the SmartSEM and the SmartPI manual.