This application is used for correlative analysis of particulate contamination on membrane filters and delivers complementary particle results depending on the used instrument. The correlative workflow starts with light microscopy (LM) analysis for particle detection and continues with electron microscopy (EM) and energy dispersive spectroscopy (EDS, often also called EDX) for extended material characterization on selected potential critical particles.

EM/EDS analysis extends the achievable results for LM analysis by reliable material characterization based on the element composition. The correlative approach results in an unique identification of metallic particles.