The following functional scope is covered.

Functional scope of software module ZEN core Technical Cleanliness Analysis (TCA)

• Job templates for measurement of particulate contamination with image acquisition and as alternative from earlier acquired images. The result calculation is based on standard templates which can be adapted in the Standard Template Editor.
• The workflow covers the following:
• Image acquisition
• Image analysis
• Image processing
• Standard-based result calculation
• Result presentation in interactive views for fast inspection and revision of detected particles
• Reports with results of characteristic values and standard specific methods per tested specimen
• Automated storage of generated results in the data archive
• Inspection and export of archived data

Functional scope for Correlative Technical Cleanliness Analysis (TCA)

In addition to the described functional scope for TCA, the following features are part of a correlative Technical Cleanliness Analysis workflow:

• Holder calibration with L-markers.
• Automated selection of particles from the standard template editor for SEM/EDS analysis.
• Manual selection of particles from the gallery in the size distribution view for SEM/EDS analysis.
• Joint particle selection table from 2. and 3. as input for S&F Find (List) tool.